Quartz Parts

Product Overview

Semixlab provides high‑purity fused quartz parts for semiconductor thermal processing, deposition, cleaning and wafer handling. Quartz combines low thermal expansion, strong thermal‑shock resistance, electrical insulation and high chemical purity, helping reduce contamination in critical wafer processes.

Available products include furnace tubes, wafer boats, tanks, chambers, liners, rings, windows and custom welded quartz assemblies.

Key Features & Advantages

High Purity: High‑purity fused quartz helps reduce alkali‑metal and trace‑metal contamination in wafer‑processing environments.
Thermal‑Shock Resistance: Very low thermal expansion supports stable operation through repeated heating and cooling cycles.
Chemical Stability: Suitable for many process gases and semiconductor cleaning chemicals; compatibility is confirmed by application.
Flexible Fabrication: Forming, welding, drilling, grinding and polishing support standard and complex quartz geometries.

Technical Specifications

Parameter	Standard / Typical Value
Material	Natural / Synthetic Fused Quartz
SiO₂ Purity	≥ 99.99%
Density	Approx. 2.2 g/cm³
CTE	Approx. 0.55 × 10⁻⁶/K
Annealing Point	Approx. 1,180°C
Softening Point	Approx. 1,680°C
Surface Finish	Flame‑Finished / Ground / Polished

Maximum operating temperature depends on part geometry, load, atmosphere and thermal‑cycle conditions.

Typical Applications

· Quartz furnace tubes and wafer boats for oxidation and diffusion
· Liners, injectors and chamber parts for CVD and epitaxy
· Quartz tanks and baths for semiconductor wet processing
· Viewports, rings and custom quartzware for vacuum systems

Customization Capabilities

Semixlab supports customized diameter, wall thickness, wafer pitch, slot geometry, flange layout, gas ports and welded structures. Customers may provide 2D/3D drawings or an approved sample for technical evaluation and replacement‑part development.

Quality Assurance & Expertise

· Raw‑material identity and purity control.
· Dimensional, surface and weld‑quality inspection.
· Optional stress, leak and cleanliness inspection by agreement.
· Consistent production support from prototype to repeat orders.

Resources & Call to Action

Engineering Consultation: Provide the wafer size, maximum temperature, ramp rate and process chemistry for technical review.
Request a Quote: Send your quartz drawing, quantity and inspection requirements.
Product Resources: Browse Semixlab product information and available quartz solutions.

Quartz Parts

Quartz is still everywhere in semiconductor processing. It’s not new, but it’s reliable, and most fabs are familiar with how it behaves. As long as purity is controlled, it works well in diffusion, oxidation, and cleaning steps.

A lot of quartz parts go into furnace systems or PECVD tools. The main expectation is stability — not necessarily long lifetime, but predictable performance. That’s usually good enough for many standard processes.

Of course, quartz does have its limits. It can wear out faster in certain conditions, especially compared with SiC. But because it’s relatively easy to source and not too expensive, people still use it quite a lot.